Release of Compact Etcher for Research and Development in Electronic Industry
ULVAC has announced the release of a compact etcher system for research and development in electronics industries. The new CE-L system comes with five-tier atmospheric cassettes modules allowing automatic processing of multiple pre-set trays, single wafer atmospheric transfer, as well as vacuum transfer.
The system is equipped with a touch panel for automatic control of substrate transfer, evacuation, and etching. The system small footprint achieved as a result of integrating mechanical and electrical components.