Development of Hybrid Type System for Decomposing PFC
September 26, 2012 · Filed Under Green Tech · Comments Off
PFCs (Perfluoro Compounds) are used in the process of etching LCD panels and semiconductors and they need to be decomposed before exhaust due to their high levels of global warming potential. The current available system requires PFCs to be decomposed by means of catalyst where the resulting fluorine-containing substances are obsorbed into water, whereby the system needs after waste water treatment. In order to remedy this issue, SDK has developed a dry-type process for removing fluorine containing substances under the catalytic decomposition system through introduction of low cost calcium based absorbent. Read more
