Novel Technology for Low Cost Detoxification of Waste Liquid and Recovery of trace amount of Precious Metal

November 27, 2013 · Filed Under Clean Tech, Trendy Products · Comments Off on Novel Technology for Low Cost Detoxification of Waste Liquid and Recovery of trace amount of Precious Metal 

Tanaka Kikinzoku has developed a technology capable of recovery of precious metal such as gold, platinum and palladium contained in trace amounts in waste liquid through detoxification of cyanogen plating waste liquid. The cyanogen plating waste liquid is produced during processing plating such as semiconductor components contain cyanogen compounds and inorganic carbonates in addition to precious metals. Read more

Development of Recycling Process for Ruthenium Precursors Used in Next Generation Semiconductor Miniaturization Technology

November 29, 2010 · Filed Under Green Tech · Comments Off on Development of Recycling Process for Ruthenium Precursors Used in Next Generation Semiconductor Miniaturization Technology 

Tokyo Electron and Tanaka Kikinzoku have announced the successful joint development of recycling process for ruthenium precursors (CVD-ruthenium material) used in the next generation semiconductor miniaturization technology. The development of the new process is a way for improving copper filling performance in semiconductor fabrication by utilizing a ruthenium liner film offering excellent adhesion and lower resistivity. As a result of this development, the ruthenium precursor that were normally disposed of in the past, can now be collected, refined and reused without returning to ruthenium metal. Read more

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